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We will present the design and implementation of monolithic and hybrid sensors using integrated circuits, particularly in CMOS. We will begin by providing the definitions and performance metrics of sensors and a brief overview of various noise processes. Subsequently, we will discuss the advantages and shortcomings of sensors built in silicon-based fabrication processes and examine, in detail, their integrated circuit topologies. Next, we will provide a comprehensive study of the design and analysis of CMOS integrated image sensors, integrated biosensors, and electronic backbone of MEMS hybrid sensors. Topics include: silicon photodetectors; CCD and CMOS sensor architectures and circuits; Affinity-based detection and biochemical transduction; optical, electrochemical, and mechanical transducer design; integrated microarrays, biochips, and sensor SoCs. We will conclude with a survey of advanced research topics in the area of integrated sensors such as smart sensors, RF-IDs, and nanosensors.
Date of Conference: 27-30 May 2007