Cart (Loading....) | Create Account
Close category search window
 

A Dynamic 3-D Surface Profilometer With Nanoscale Measurement Resolution and MHz Bandwidth for MEMS Characterization

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Liang-Chia Chen ; Nat. Taipei Univ. of Technol., Taipei ; Yao-Ting Huang ; Kuang-Chao Fan

Commercialization of microelectromechanical systems (MEMS) has made accurate dynamic characterization a major challenge in design and fabrication. In view of this need, a dynamic 3-D surface profilometer involving white light interferometric scanning principle with a stroboscopic LED light source was developed. The developed instrument was applied to a microcantilever beam used in atomic force microscopy (AFM) to analyze its full-field resonant vibratory behavior. The first five resonant vibration modes were fully characterized with vertical measurement accuracy of 3-5 nm and vertical measurement in the range of tens of micrometers. The experimental results were consistent with the outcomes of the theoretical simulation by ANSYS. Using stroboscopic illumination and white light vertical scanning techniques, the developed static and dynamic 3D nanoscale surface profilometry of MEMS devices can achieve measurement range of tens of micrometers and dynamic bandwidth of up to 1-MHz resonance frequency.

Published in:

Mechatronics, IEEE/ASME Transactions on  (Volume:12 ,  Issue: 3 )

Date of Publication:

June 2007

Need Help?


IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.