Bulk-Metal-Based Mems Fabricated by Micro-Electro-Discharge Machining

This paper presents the recent development of micro-electro-mechanical systems (MEMS) and devices realized by planar micromachining of metal foils. New types of cardiac stents including sensor-integrated antenna stents, a micromachined Kelvin probe with an integrated actuator, an intraluminal flow sensor cuff, and a mechanically/chemically robust capacitive pressure sensor are reported. Micro-electro-discharge machining (muEDM) and the modified processes were used for the fabrication of the devices with mechanical or electromechanical functionality. The cost-effective manufacturing is potentially available with the use of the batch mode muEDM technology that employs lithographically fabricated microelectrode arrays.