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A low-profile power inductor fabricated using low temperature co-fired ceramics (LTCC) technology has been demonstrated to improve the light-load efficiency of a 5 V-to-1 V, 12.5 A buck converter operating with a switching frequency of 4 MHz, without the use of additional control circuitry. Variation in inductor geometry is performed experimentally to study the effects on the light-load efficiency of a converter. By decreasing the conductor width of the inductor, the light-load efficiency can be further improved by more than 30 % over that of commercial inductors having similar inductance. An empirical model is developed based on in-circuit large signal measurements to describe the relationship among inductance, average current, and inductor geometry to help in the future design of such planar inductors.