By Topic

Specific nearby electronic scheme for multiplexed excitation and detection of piezoelectric silicon-based micromembranes resonant frequencies using FPGA technology

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)

A new concept for a precise compensation of the static capacitance of piezoelectric silicon-based micromembranes is proposed. Combining analogue and digital (FPGA) hardware elements with specific software treatment, this system enables the parallel excitation and detection of the resonant frequencies (and the quality factors) of piezoelectric silicon-based micromembranes integrated on the same chip. The frequency measurement stability is less than 1 ppm (1-2 Hz) with a switching capability of 4 membranes/sec and a measurement bandwidth of 1.5 Mhz.

Published in:

Sensors, 2006. 5th IEEE Conference on

Date of Conference:

22-25 Oct. 2006