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Self-testable Pressure Sensors Based on Phase Change

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5 Author(s)
Mingxue Huo ; MEMS Center, Harbin Inst. of Technol. ; Rongyan Chuai ; Liang Yin ; Xiaowei Liu
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Novel self-testable pressure sensors based on phase change have been fabricated. The sensors were built in a glass-silicon-glass sandwich structure. Water acted as the phase change material (PCM) was injected into the cavity of the pressure sensor. Applying voltage to the heating resistor, the PCM boiled. The vapor produced by phase change can produce high enough self-testable output. Therefore, the method had been used for large-scale pressure sensors. The design and simulation of the new structure, the main fabrication process, and the experimental results on the self-testable function were presented. The self-testable output is up to 3.0% of the full-scale output

Published in:

Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on

Date of Conference:

18-21 Jan. 2006