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Emission Characteristics of Nanocrystalline Porous Silicon Ballistic Cold Cathode in Atmospheric Ambience

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3 Author(s)
Toshiyuki Ohta ; Graduate School of Engineering, Tokyo University of A & T,2-24-16 Nakacho, Koganei, Tokyo 184-8588, Japan ; Akira Kojima ; Nobuyoshi Koshida

The nc-Si cold cathode operates in atmospheric pressure of various gases. These results are consistent with the model that the energetic electrons are produced in nc-Si dot chain structures. In the case of air, negative ions are generated by dissociative attachment of energetic electrons to O2 molecules. Both the complete passivation of nc-Si surfaces and the suppression of interfacial traps between neighboring nc-Si dots are key issues for enhancement in the efficiency and stability

Published in:

2006 19th International Vacuum Nanoelectronics Conference

Date of Conference:

July 2006