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A fast rescheduling method in semiconductor manufacturing allowing for tardiness and scheduling stability

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6 Author(s)
Mingang Cheng ; Dept. of Precision Eng., Tojyo Univ., Tokyo ; Masao Sugi ; Jun Ota ; Masashi Yamamoto
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In semiconductor manufacturing, rescheduling problems are extremely difficult to solve in real time due to the high frequency of disturbances that occur approximately every minute. This paper proposes a new approach to online manufacturing rescheduling. Unlike the traditional methods to have a scheduling process again, we (1) revise the existing schedule to keep high schedule stability based on message passing rescheduling with operation sorting; and (2) during the manufacturing process, improve the performance of the revised schedule with the introduction of a quick local search on semi-critical paths. In actual problems with about 200,000 processes, this method can effectively accommodate disturbances in less than 1 second, and a better schedule can be obtained in less than 1 minute. This method has been demonstrated to be more effective than conventional dispatching-rule methods, some of which have been actually applied in many facilities, because it offers higher schedule stability and fewer violations of due dates

Published in:

2006 IEEE International Conference on Automation Science and Engineering

Date of Conference:

8-10 Oct. 2006