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On the Use of Structural Vibrations to Release Stiction Failed MEMS

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5 Author(s)
Savkar, A.A. ; Dept. of Mech. Eng., Connecticut Univ., Storrs, CT ; Murphy, K.D. ; Leseman, Z.C. ; Mackin, T.J.
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This paper identifies dynamic excitation parameters that promote decohesion of stiction-failed microcantilevers. The dynamic response of "s-shaped" adhered beams subjected to harmonic loading is described using modal analysis; this model is then used to predict the onset of debonding in the context of a critical interface energy. These theoretical results are used to rationalize preliminary experiments, which illustrate that dynamic excitation may be used to affect partial or complete repair of stiction-failed microcantilevers. The theoretical results provide fundamental insight regarding regimes where resonant effects trigger debonding and can serve as a potential mechanism for stiction repair. The models illustrate that driving a structure at resonance is usually beneficial with regards to debonding. However, this is not universally true; there is no benefit to driving a device at frequencies with unfavorable mode-shapes. Thus, these results provide a reasonable physical and mathematical explanation for the preliminary experimental results, while providing a roadmap for identifying parameters in future tests

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Microelectromechanical Systems, Journal of  (Volume:16 ,  Issue: 1 )