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Silicone Oil Contamination and Electrical Contact Resistance Degradation of Low-Force Gold Contacts

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2 Author(s)
Daniel J. Dickrell ; Dept. of Mech. & Aerosp. Eng., Florida Univ., Gainesville, FL ; Michael T. Dugger

Hot-switched low-force gold electrical contact testing was performed using a nanomechanical test apparatus to ascertain the sensitivity of simulated microelectromechanical systems (MEMS) contact to silicone oil contamination. The observed cyclic contact resistance degradation was dependent on both closure rate and noncontact applied voltage. The decomposition of silicone oil from electrical arcing was hypothesized as the degradation mechanism

Published in:

Journal of Microelectromechanical Systems  (Volume:16 ,  Issue: 1 )