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Silicon nanotechnologies and emerging non-silicon nanoelectronics

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1 Author(s)
Chau, R. ; Components Res., Technol. & Manuf. Group, Intel Corp., Sta. Clara, CA

This presentation summarizes some of the most recent Si innovations made for advanced CMOS transistors in the nanotechnology era. Through these Si nanotechnologies, it is expected that CMOS scaling and performance trends extend and continue well into the next decade. Additionally, there has been much interest generated recently in the research of non-silicon materials and nanoelectronic devices and their integration onto the existing Si platforms for future high-speed and low-power applications. The challenges and opportunities of these emerging non-Si nanotechnologies are also discussed in this presentation

Published in:

Solid-State and Integrated Circuit Technology, 2006. ICSICT '06. 8th International Conference on

Date of Conference:

23-26 Oct. 2006

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