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RF-MEMS Switched Varactor for High Power Applications

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9 Author(s)
C. Palego ; XLIM, 123 Av. Albert Thomas 87060 LIMOGES, France. ; A. Pothier ; T. Gasseling ; A. Crunteanu
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A new kind of MEMS switched varactor has been developed to handle high power RF signals, (P>1W), at S and X-band. The design principle is presented, as well as measurements results featuring an analysis of the reliability tests. The fabricated varactors have shown a capacitance ratio of 7-8 at 5 GHz and good performances reproducibility while undergoing 1 billion cycle tests under an input RF power of 1W @ 10GHz, and 250 million cycle tests under 5W @ 3GHz, both in hot switching conditions, without visible degradation

Published in:

2006 IEEE MTT-S International Microwave Symposium Digest

Date of Conference:

11-16 June 2006