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Aqueous-Base-Developable Benzocyclobutene (BCB)-Based Material Curable in Air

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11 Author(s)
Ying-Hung So ; Dept. of Adv. Electron. Mater., Dow Chem. Co., Midland, MI ; Stark, E.J. ; Yongfu Li ; Kisting, S.
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A positive-tone and aqueous-base-developable benzocyclobutene (BCB)-based dielectric material curable in air is described in this paper. The prepolymer is made from divinylsiloxane bisbenzocyclobutene (DVS-bisBCB) and BCB-acrylic acid. The formulation contains antioxidants that allow the prepolymer to cure in air and a diazonaphthaquinone to make it photosensitive. Patterned films have high resolution, and via openings are scum-free without a descum operation. Whether cured in nitrogen or in air, the prepolymer produces a film with optical, electrical, thermal, and mechanical properties desirable for many microelectronic applications, such as packaging applications and as a planarization or insulation layer in display applications

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Advanced Packaging, IEEE Transactions on  (Volume:29 ,  Issue: 4 )