A micromachined array probe card-fabrication process

A probe card designed to address future testing requirements has been demonstrated. The fabrication process is described in detail. The array probe card is a membrane style probe card fabricated from a silicon wafer with typical integrated circuit and micromachining technologies. The probe card is capable of providing a very large number of probe tips (>1000) in any format, including the array pad format, and is designed to satisfy the requirements for high speed and high resolution wafer-level testing.<
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