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Nonplanar silicon strain sensors

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3 Author(s)
Bower, R.W. ; California Univ., Davis, CA, USA ; Spencer, R.R. ; Lee, D.D.

Variations of conventional thin-membrane strain sensors are described which use a series of anisotropic etches on

Published in:

Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE

Date of Conference:

6-9 June 1988