By Topic

A monolithic silicon accelerometer with integral air damping and overrange protection

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)

Novel piezoresistance silicon accelerometers for full-scale accelerations on the order of 0.5 G-100 G have been designed, fabricated, and tested. These, dual-beam cantilever devices incorporate silicon structures introduced at the wafer level for air damping and bidirectional overrange protection, resulting in a silicon/glass chip approximately 3.4 mm square and 1.5 mm thick, suitable for packaging in many configurations and for use in many applications. Critical damping and overdamping have been demonstrated with roll-off frequencies 500 Hz and above, and shock survival above 1000 G in all axes has been achieved. Cross-axis sensitivity is less than 2% for any axis. Device design was accomplished using finite-element modeling (FEM) to assess sensitivity, temperature coefficients, resonance modes, cross-axis sensitivity, and overrange characteristics. Analytical modeling was used to 'benchmark' the FEM predictions for simplest cases, and experimental results are in good agreement with FEM.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1988. Technical Digest., IEEE

Date of Conference:

6-9 June 1988