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A large-scale SPC implementation using the IBM multimedia SPC program

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2 Author(s)
Harrison, M. ; IBM Technol. Products, Essex Junction, VT, USA ; Shapiro, R.

The implementation of statistical process control (SPC) in the chemical vapor deposition (CVD) process area of a semiconductor wafer fabricator is described. Advanced self-study interactive video/computer training and a series of cross-functional meetings were used for problem solving. The training that production employees received enabled them to enhance their basic statistical knowledge and skills, while cross-functional group meetings served as the vehicle for bringing that knowledge and experience together in the manufacturing environment to establish SPC online controls

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992

Date of Conference:

30 Sep-1 Oct 1992