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Application of diamond-like carbon film for microdynamic devices

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2 Author(s)
Deng, K. ; Dept. of Electr. Eng. & Appl. Phys., Case Western Reserve Univ., Cleveland, OH, USA ; Ko, W.H.

For microdynamic devices, static friction is one of the important characteristics. Studies on silicon electric micromotors indicate that friction in the bearings and at the bushings can dissipate a significant fraction of the micromotor motive torque. The coefficient of static friction is 0.2-0.7 between silicon and silicon-compound contacts measured in ultra high vacuum (UHV), and those values vary with exposure to the different gases. To find a low friction coating material for microdynamic devices, the authors studied diamond-like carbon (DLC) film under the same measurement conditions. The results indicate that DLC films show potential as a low wear, friction reducing coating for microdynamic devices.<>

Published in:

Solid-State Sensor and Actuator Workshop, 1992. 5th Technical Digest., IEEE

Date of Conference:

22-25 June 1992