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Discontinuous Innovation: Strained Silicon Technology

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1 Author(s)
G. L. Patton ; IBM Systems & Technology Group, 2070 Route 52, Hopewell Junction, NY, 12533, USA, Phone: 1-845-894-3723. E-mail:

Strained silicon technology has had a dramatic impact on extending the limits of semiconductor technology. Due to the difficulties of both bipolar and CMOS scaling, strained layer technology offers a manufacturability approach to change the material properties of silicon and significantly enhance performance

Published in:

2006 International SiGe Technology and Device Meeting

Date of Conference:

15-17 May 2006