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Cost-Effective Integrated RF Power Transistor in 0.18- \mu\hbox {m} CMOS Technology

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6 Author(s)
Tao Yan ; Inst. of Microelectron., Peking Univ., Beijing ; Huailin Liao ; Yong Zhong Xiong ; Rong Zeng
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A novel MOS power transistor with high breakdown voltage is proposed and manufactured in a standard 0.18-mum CMOS process without any additional masks or extra process steps. A "U"-type n- drift region formed with shallow trench isolation (STI) layer and n-well is adopted to improve the breakdown voltage. A MOS transistor with 11.6-V breakdown voltage, 18-GHz cutoff frequency, and 30-GHz maximum oscillation frequency has been demonstrated. In addition, it has 11.5-dB power gain, 19.3-dBm output power at 2.45 GHz with power-added efficiency (PAE) of 55%, and 8.3-dB power gain 18.7-dBm output power at 5.8 GHz with PAE of 38%. The presented RF power transistor is cost effective and can be conveniently applied in the power amplifier integration for RF SoC

Published in:
Electron Device Letters, IEEE  (Volume:27 ,  Issue: 10 )

Date of Publication: Oct. 2006

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