Referenced Items are not available for this document.
In this letter, we present experimental data showing Q change versus thickness for a quartz-crystal resonator fabricated with deep-reactive ion etching. Measurements show that Q increases as etch depth increases, and further that Q can be optimized as a function of etch depth and diameter of the resonator.
Published in:
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on
(Volume:53
,
Issue:
7
)
Date of Publication: July 2006
- Page(s):
- 1234 - 1236
- ISSN :
- 0885-3010
- Digital Object Identifier :
- 10.1109/TUFFC.2006.1665070
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 07 August 2006
- Issue Date :
- July 2006
- Sponsored by :
- IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society
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