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In this letter, we present experimental data showing Q change versus thickness for a quartz-crystal resonator fabricated with deep-reactive ion etching. Measurements show that Q increases as etch depth increases, and further that Q can be optimized as a function of etch depth and diameter of the resonator.
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on (Volume:53 , Issue: 7 )
Date of Publication: July 2006