Referenced Items are not available for this document.
We report experimental results from non-invasive second harmonic generation (SHG) measurements applied to detect the presence of contamination at the silicon/buried oxide (BOX) and BOX/substrate interfaces in silicon-on-insulator (SOI) wafers. The potential application of SHG as a metrology tool for process control is demonstrated
Published in:
Advanced Semiconductor Manufacturing Conference, 2006. ASMC 2006. The 17th Annual SEMI/IEEE
Date of Conference: 22-24 May 2006
- Page(s):
- 1 - 6
- ISSN :
- 1078-8743
- Print ISBN:
- 1-4244-0254-9
- INSPEC Accession Number:
- 9075243
- Conference Location :
- Boston, MA
- Digital Object Identifier :
- 10.1109/ASMC.2006.1638714
- Product Type:
- Conference Publications
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