Referenced Items are not available for this document.
Surface-micromachined deformable mirrors that exhibit greater than 10 μm of stroke are presented. The segmented arrays described here consist of 61 and 85 hexagonal, piston/tip/tilt mirrors (three actuators each) with diameters of 500 and 430 μm, respectively, and fill a 4 mm circular aperture. Devices were packaged in 208 and 256 pin-grid arrays and driven by a compact control board designed for turn-key operation. After metallization and packaging mirror bow is ∼680 nm (λ/1), but a heat-treatment procedure is proposed for controlling mirror curvature to better than λ/10. An optical test bed was used to demonstrate basic beam splitting and open-loop aberration correction, the results of which are also presented.
Published in:
Microelectromechanical Systems, Journal of
(Volume:15
,
Issue:
3
)
Date of Publication: June 2006
- Page(s):
- 572 - 583
- ISSN :
- 1057-7157
- INSPEC Accession Number:
- 8975754
- Digital Object Identifier :
- 10.1109/JMEMS.2006.876794
- Date of Current Version :
- 05 June 2006
- Issue Date :
- June 2006
- Sponsored by :
- IEEE Electron Devices Society
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
