Error sources in in-plane silicon tuning-fork MEMS gyroscopes

This paper analyzes the error sources defining tactical-grade performance in silicon, in-plane tuning-fork gyroscopes such as the Honeywell-Draper units being delivered for military applications. These analyses have not yet appeared in the literature. These units incorporate crystalline silicon anodically bonded to a glass substrate. After general descriptions of the tuning-fork gyroscope, ordering modal frequencies, fundamental dynamics, force, and fluid coupling, which dictate the need for vacuum packaging, mechanical quadrature, and electrical coupling are analyzed. Alternative strategies for handling these engineering issues are discussed by introducing the Systron Donner/BEI quartz rate sensor, a successful commercial product, and the Analog Device (ADXRS), which is designed for automotive applications.