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Characterization of micromachined silicon rectangular waveguide at 400 GHz

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5 Author(s)
Kirby, P.L. ; Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Pukala, D. ; Manohara, H. ; Mehdi, I.
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We present the first characterization of a micromachined silicon rectangular waveguide at 400GHz. The silicon waveguide has an average loss of 0.086dB/mm for a range of 350-460GHz. The waveguides are formed using well known microfabrication techniques and demonstrate a successful first step towards the use of silicon waveguides as a viable option for THz systems.

Published in:

Microwave and Wireless Components Letters, IEEE  (Volume:16 ,  Issue: 6 )