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Ultrasensitive Mass Sensor Based on Lateral Extensional Mode (LEM) Piezoelectric Resonator

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6 Author(s)
Wei Pang ; Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089-0271 ; Le Yan ; Hao Zhang ; Hongyu Yu
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This paper introduces a new resonant mass sensor that is based on a lateral extensional mode (LEM) piezoelectric resonator, and has a minimum detectable mass (MDM) of 10-15g in air at room temperature. The resonator with size of about 200×50×1 μm3has a quality factor (Q) of > 1,400 at 60MHz, and as small as 0.1ppm shift of its resonant frequency can be detected. The 0.1ppm detection capability corresponds to a mass uncertainty of only about 4.6fg. We have experimentally demonstrated a minimum detectable frequency shift of about ~ 1.6ppm due to an absorption of isopropanol vapor (73 fg) on the sidewalls of the parylene-coated LEM piezoelectric resonator.

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Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on

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