Gbps signal transmission on Si CMOS ULSI

We have developed on-chip transmission line interconnect for Gbps signal transmission on cm-order long metal interconnects. In this paper, design and electrical performance of differential transmission lines, high density transmission line interconnect structure, Tx/Rx circuit are presented. Furthermore, it is also shown that the both delay time and power consumption of DTL global interconnect are become superior to that of the conventional RC global interconnect with repeaters as a technology node progressed, such as in below 90nm technology node.