A novel high performance integrated PTPD is proposed. The device incorporates a standard phototransistor (PT) and a surface photodetector (SPD) to frilly utilize the incident light energy. Samples in standard 0.35mum SiGe BiCMOS technology were fabricated and characterized. Compared with reference PT of the same size, the PTPD exhibits one order of magnitude improvement in responsivity
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Semiconductor Device Research Symposium, 2005 International
Date of Conference: 7-9 Dec. 2005