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Sensorless vibration suppression and scan compensation for piezoelectric tube nanopositioners

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2 Author(s)
Fleming, Andrew J. ; Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Australia ; Moheimani, S.O.R.

Piezoelectric tube scanners are employed in high-resolution positioning applications such as scanning probe microscopy and nanofabrication. Much research has proceeded with the aim of reducing hysteresis and vibration-the two foremost problems associated with piezoelectric tube scanners. In this paper, two simple techniques are proposed for simultaneously reducing hysteresis and vibration: 1) A new dc accurate charge amplifier is shown to significantly reduce hysteresis while avoiding characteristic voltage drift. 2) Piezoelectric shunt damping, a technique previously resident in the field of smart structures, has been applied to damp tube vibration. By attaching an LCR impedance to a single tube electrode, the first mechanical mode is reduced in magnitude by more than 20 dB.

Published in:

Control Systems Technology, IEEE Transactions on  (Volume:14 ,  Issue: 1 )

Date of Publication:

Jan. 2006

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