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This paper describes the use of integrated heaters and closed-loop applications for temperature control of planar waveguide circuits. The history of arrayed waveguide gratings (AWG) temperature control is discussed along with the difficulties in applying this control. Modeling and measurement results for external and integrated heaters will be presented. Fundamental considerations as well as modeling and measurement of the thermal characteristics of various physical constructions are discussed, and the rationale for applying these disciplines to a given problem is highlighted. In this work, we will present the evolution of these unique integrated thin film heaters and review thermal-optical modeling to experimental demonstration of the AWG. The goal of the work is to provide a solution path for integration of multiple optical devices on a single substrate from a thermomechanical as well as optical discipline point of view.