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Integrated hollow waveguides with arch-shaped cores

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6 Author(s)
J. P. Barber ; Electr. & Comput. Eng. Dept., Brigham Young Univ., Provo, UT, USA ; E. J. Lunt ; Z. A. George ; Dongliang Yin
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An optical waveguide is described that has a hollow arch-shaped core. Optical confinement for this structure is based on the antiresonant reflecting optical waveguide principle. The waveguides are built on a silicon substrate using a sacrificial etch technique with reflowed photoresist serving as the sacrificial material and producing the core's arch shape. Investigations of fabrication parameters are reported that allow for predicting a final arch-shaped geometry based on initial photoresist width and thickness. Optical mode guiding is demonstrated in an arch-shaped waveguide with a liquid core.

Published in:

IEEE Photonics Technology Letters  (Volume:18 ,  Issue: 1 )