By Topic

Thickness dependences on microwave tunable properties for (Ba, Sr)TiO3 thin films in planar capacitor structure

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)

(Ba0.6Sr0.4)TiO3 thin films of various thicknesses on sapphire-R substrate have been fabricated using the chemical solution deposition method (CSD). Inter-digitated electrode arrays in planar capacitor were formed on the surface of the BST thin film with e-beam evaporated Cu using photolithographic lift-off process. The measured capacitances of the planar-capacitor decreased with the film thickness because the electromagnetic field propagates across high permittivity BST thin film to the sapphire substrate. However, we found that permittivity of BST thin films remained large until 90 nm thick based on the electromagnetic field analysis using the finite element method. On the other hand, tunability of BST thin films decreased with the film thickness.

Published in:

Microwave Symposium Digest, 2005 IEEE MTT-S International

Date of Conference:

12-17 June 2005