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On the scale effect of magnetic induction heating for microstructure

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2 Author(s)
Hsueh-An Yang ; Dept. of Power Mech. Eng., National Tsing Hua Univ., Hsinchu, Taiwan ; Weileun Fang

Magnetic induction heating is a promising heating approach for MEMS processes and devices. This study has discussed the scale effect of induction heating for thin-film microstructures through the analytical and experimental means. The results show that the rising temperature varies with the in-plane surface area of microstructure and the relative permeability of thin-film materials. Moreover, the shape of microstructure also leads to the different of rising temperature. In applications, localized heating and temperature regions can be simultaneously achieved on substrate by applying a external high frequency magnetic field.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005