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The authors have microfabricated a MEMS (micro electro mechanical system) based thin palladium (Pd) membrane microreactor with oxidized porous silicon (PS) support. The hydrogen flux through the Pd membrane with a thickness of 340 nm was 0.112 mol m-2s-1 at 250 °C and a partial pressure difference of 110 kPa. H2/N2 and H2/He selectivity was about 46 and 10 at 250 °C, respectively. The thermal isolation of the Pd membrane, which was heated by an integrated microheater, was realized by using the oxidized PS. The authors also carried out the hydrogenation of 1-butene at 250 °C using the developed microreactor.
Date of Conference: 5-9 June 2005