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High-tone bulk acoustic resonator integrated with surface micromachined FBAR filter on a single chip

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5 Author(s)
Wei Pang ; Dept. of Electr. Eng., Southern California Univ., Los Angeles, CA, USA ; Hao Zhang ; Jong Jin Kim ; Hongyu Yu
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This paper describes a novel high-tone bulk acoustic resonator (HBAR) integrated with a surface micromachined FBAR (film bulk acoustic resonator) filter on sapphire substrate. The single-mode HBAR exhibited a loaded quality factor (Qloaded) of 3,580 at 2.5 GHz with a total size (including the contact pads) of 0.8×0.4×0.4mm3. The integrated narrow band FBAR filter provides adequate suppression (>4dB) of the unwanted modes in the HBAR. This high Q and small size resonator is ideally suited for Pierce oscillator for voltage controlled oscillator (VCO) above 2 GHz.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005