Scheduled System Maintenance:
Some services will be unavailable Sunday, March 29th through Monday, March 30th. We apologize for the inconvenience.
By Topic

Microactuators based on ion-implanted dielectric electroactive polymer membranes (EAP)

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

The purchase and pricing options are temporarily unavailable. Please try again later.
9 Author(s)
Dubois, P. ; Microsyst. for Space Technol. Lab., Ecole Polytechnique Federale de Lausanne, Switzerland ; Rosset, S. ; Koster, S. ; Buforn, J.-M.
more authors

The authors reported on the first ion-implanted dielectric electroactive polymer actuator that was successfully microfabricated and tested. Ion implantation is used to make the surface of the polymer locally conducting. Implanting the compliant electrodes solves the problem of how to microfabricate patterned electrodes having elasticity close to that of the insulating elastomer. Dieletric EAP actuators combine in an exceptional way high energy-density, while allowing large amplitude displacements (Ashley, 2003 and Pelrine et al., 2000). The ion-implant approach avoids the deposition of metal electrodes on the polymer, normally accompanied with an undesired stiffening of the membrane. The actuator consists of a 35-μm thick ion implanted PDMS membrane bonded to a silicon chip containing a hole. 110-μm vertical displacements of a square membrane measuring 1 mm2 was observed.

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005