Referenced Items are not available for this document.
Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C3H9O3P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH3CN) as a simulant gas for blood gas. Sensing materials are Pt/SnO2, where Pt layer (30 Å) is deposited on tin oxide film grown on alumina substrate, (Sn,In)O2/Pt and SnO2/Pt, where (Sn,In)O2 and tin oxide films are deposited on Pt layer (30 Å) grown on alumina substrate, respectively. In the latter two sample have a nano-wire structure grown over thin film. The thickness of nano-wire is ∼ 60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH3CN. We display the results compared that of nano-wire with ordinary tin oxide sample.
Published in:
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
(Volume:2
)
Date of Conference: 5-9 June 2005
- Page(s):
- 1899 - 1902 Vol. 2
- Print ISBN:
- 0-7803-8994-8
- INSPEC Accession Number:
- 8660079
- Digital Object Identifier :
- 10.1109/SENSOR.2005.1497468
- Product Type:
- Conference Publications
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
