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Thin film gas sensors based on tin oxide are fabricated and its characteristics are examined. Target gases are dimethyl methylphosphonate(C3H9O3P, DMMP) as a simulant gas for nerve gas GA (Tabun) and acetonitrile (CH3CN) as a simulant gas for blood gas. Sensing materials are Pt/SnO2, where Pt layer (30 Å) is deposited on tin oxide film grown on alumina substrate, (Sn,In)O2/Pt and SnO2/Pt, where (Sn,In)O2 and tin oxide films are deposited on Pt layer (30 Å) grown on alumina substrate, respectively. In the latter two sample have a nano-wire structure grown over thin film. The thickness of nano-wire is ∼ 60 nm. Nano-wire sensors grown on thin film show high sensitivity and stability to DMMP and CH3CN. We display the results compared that of nano-wire with ordinary tin oxide sample.
Date of Conference: 5-9 June 2005