Cart (Loading....) | Create Account
Close category search window

An ultrasensitive chemical microsensor based on self-aligned dry-patterned environmentally sensitive hydrogels

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Ming Lei ; Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN, USA ; Woohyek Choi ; Siegel, R.A. ; Ziaie, B.

In this paper, we report on the fabrication and testing of an ultrasensitive chemical microsensor based on an environmentally sensitive hydrogel actuated cantilever beam. A single-mask dry-etching technique was used to pattern two kinds of hydrogels (pH and glucose sensitive) underneath the beam without requiring any alignment (self-aligned) and photoinitiators. The hydrogels swell in response to an increase in the pH or glucose concentration, thereby deflecting the microcantilevers by pushing it up. Typical sensitivities for a sensor having dimensions of 500 × 20 × 2 μm3 were measured to be ∼7.2 μm/pH units and 0.1 μm/mM of glucose concentration. First order swelling pressures of 2550 and 1580 Pa were also calculated from the deflection measurements. Extreme extrapolated sensitivities of 1 nm/1.4 × 10-4 pH unit and 1 nm/0.01 mM of glucose concentration can be achieved using an optical lever detection method similar to the ones employed in the AFMs (resolution of 1 nm). The measured response times for these sensors were several seconds (typically < 10 s).

Published in:

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on  (Volume:2 )

Date of Conference:

5-9 June 2005

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.