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We describe a new fabrication method for a glass microchip using amorphous silicon on the glass surface as an etch mask and a bonding interface for anodic bonding. We investigated the mobilities and bandwidths of electroosmotic flow (EOF) and analytes in microchip electrophoresis. Significant band broadening was observed in a microchip composed of a hybrid material (glass and silicon dioxide membrane) compared with a microchip of single material due to the nonuniformity of the surface charge density.
Date of Conference: 5-9 June 2005