A novel PDMS process to fabricate a microchannel with round cross-section has been developed. The adsorption of liquid PDMS (soft PDMS) on solidified PDMS (hard PDMS) is stronger than the atomic cohesion force (interaction force) of liquid PDMS. Therefore, when the solidified PDMS contacts on the surface of the liquid PDMS, a meniscus is formed around the liquid PDMS like the surface of liquid in a glass tube driven by surface tension. From the experiments with various conditions, we found that the shape of the cross-section can be under control like the simple 'U' shape, elliptical shape, semicircular, and circular shape and that the novel technique is very useful in the development of LOC (lab on a chip) or various microfluidic devices.
Published in:
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
(Volume:2
)
Date of Conference: 5-9 June 2005