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Replication of microneedle arrays using vacuum casting and hot embossing

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5 Author(s)
A. Trautmann ; IMTEK, Freiburg Univ., Germany ; F. Heuck ; C. Mueller ; P. Ruther
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The replication of silicon (Si) microneedle arrays via a soft silicone rubber mold into various polymers, namely SU-8, epoxy, cycloolefine copolymer (COC), and polycarbonate (PC) is reported. Vacuum casting and hot embossing are used to fabricate polymer wafers with 98 microneedle array dies with an individual size of 6×6 mm2 each containing 841 microneedles. The same soft rubber mold can be used for both replication methods. Needles with heights of 75 μm and 150 μm, tip radii and edge radii below 2 μm and 1 μm, respectively, are excellently reproduced. The application of the needles in allergy testing is demonstrated.

Published in:

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.  (Volume:2 )

Date of Conference:

5-9 June 2005