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We have studied reversible electrical modification of a conductive polymer for ultra high density data storage based on a scanning probe microscope (SPM). A thin conductive polymer film of polyaniline (PANI) was formed using a surface-initiated polymerization (SIP) method on a substrate coated with Au. This SIP is started from a self-assembled monolayer (SAM). The tip of a conductive SPM probe was placed in contact with the conductive polymer, and a reversible electrical modification was carried out with applying a voltage between the SPM probe and the conductive polymer. An electrochemical reaction of the polymer via a thin water layer on the surface causes this conductivity changes.