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Monolithic CMOS multi-transducer gas sensor microsystem

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9 Author(s)
Y. Li ; Phys. Electron. Lab., ETH Zurich, Switzerland ; C. Vancura ; D. Barrettino ; M. Graf
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This paper presents a monolithically integrated multi-transducer microsystem to detect organic and inorganic gases. The system comprises two polymer-based sensor arrays, a metal-oxide-based sensor array, driving and signal processing electronics and a digital communication interface. The chip is fabricated in industrial 0.8 μm CMOS-technology with subsequent post-CMOS micromachining and operates at a supply voltage of 5 volt. The monolithic integration of different transducer types with associated driving and read-out circuitry significantly improves the discrimination capability of the system and reduces the packaging efforts.

Published in:

The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.  (Volume:2 )

Date of Conference:

5-9 June 2005