By Topic

Radio-Frequency Planar Integrated Inductor With Permalloy-SiO _2 Granular Films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Jiahao Zhao ; Dept. of Mater. Sci. & Eng., Tsinghua Univ., Beijing, China ; Jing Zhu ; Zhongmin Chen ; Zewen Liu

We have designed and fabricated a radio-frequency (RF) planar integrated inductor using Permalloy-SiO _2 granular film as the magnetic core. By controlling the composition and microstructure, we produced a granular film with excellent soft magnetic properties and high electrical resistivity. The inductance L of the inductor with granular Permalloy-SiO _2 magnetic film increased 6% to 15%, compared to that of an air-core inductor, and the quality factor Q value was high, approaching 10 in the frequency range of 2–3 GHz. The controllable anisotropy of the granular film generated in deposition process gives the magnetic inductor a very high self-resonance frequency peak—over 6 GHz.

Published in:

IEEE Transactions on Magnetics  (Volume:41 ,  Issue: 8 )