Radio-frequency planar integrated inductor with Permalloy-SiO/sub 2/ granular films

We have designed and fabricated a radio-frequency (RF) planar integrated inductor using Permalloy-SiO/sub 2/ granular film as the magnetic core. By controlling the composition and microstructure, we produced a granular film with excellent soft magnetic properties and high electrical resistivity. The inductance L of the inductor with granular Permalloy-SiO/sub 2/ magnetic film increased 6% to 15%, compared to that of an air-core inductor, and the quality factor Q value was high, approaching 10 in the frequency range of 2-3 GHz. The controllable anisotropy of the granular film generated in deposition process gives the magnetic inductor a very high self-resonance frequency peak-over 6 GHz.