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CO gas detection utilizing Pd-SnOx MIS heterostructure

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2 Author(s)
C. K. Kim ; Dept. of Electr. Eng., Vanderbilt Univ., Nashville, TN, USA ; W. P. Kang

The triangular voltage sweep method was used to study the device characteristics of Pd-SnOx MIS heterostructure for detection of CO gas. An increase in area under the current peak in the J p-V plot and a shift of current peak toward more positive gate bias voltages were found with increasing CO gas concentration in an O2 or Ar environment. Results indicate that CO gas reacts with preadsorbed oxygen ions, which interact with positive ions in the SnO2 oxide layer, thus increasing the number of positive ions in the oxide of the MIS capacitor. It is concluded that preadsorbed oxygen ions in the SnO2 play a more important role than the lattice oxygen for CO gas detection in the Pd-SnOx MIS heterostructure

Published in:

Southeastcon '91., IEEE Proceedings of

Date of Conference:

7-10 Apr 1991