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Mechanical characteristics of FIB deposited carbon nanowire by electrostatic actuated nano tensile testing devices (EANAT)

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5 Author(s)
Y. Isono ; Dept. of Micro Syst. Technol., Ritsumeikan Univ., Shiga, Japan ; M. Kiuchi ; S. Sugiyama ; T. Morita
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This research develops Electrostatic Actuated NAno Tensile testing devices, which are named "EANAT" from the initial letter, in order to reveal mechanical properties of carbon nanowires deposited by focused ion beam assisted chemical vapor deposition (FIB-CVD). Nanometric carbon structures deposited by FIB-CVD are one of promising nanomateriais used for NEMS. In this research, mechanical properties of 85 nm-diametric carbon nanowires were evaluated using three types of EANAT containing electrostatic comb drive actuators from 1000 to 5000 pairs. Young's modulus of carbon nanowires averaged 80 GPa, which is close to reported values of ultra-thin diamond-like carbon films. The tensile strength of nanowires was also 6 GPa in average.

Published in:

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.

Date of Conference:

30 Jan.-3 Feb. 2005