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TEM observation of tensile deformation of silicon nanowire between micromachined sharp opposing tips

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4 Author(s)
Ishida, Tadashi ; IIS, Tokyo Univ., Japan ; Kakushima, K. ; Mita, M. ; Fujita, H.

Process of forming a single-crystalline silicon nanowire was successfully in-situ TEM observed for the first time in between microfabricated silicon probe tips driven by integrated electrostatic microactuators; the I-V characteristics of silicon nanowire was correlated with TEM in-situ observation of the wire upon its formation (by tip contact), extension, and extinction.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005