TEM observation of tensile deformation of silicon nanowire between micromachined sharp opposing tips

Process of forming a single-crystalline silicon nanowire was successfully in-situ TEM observed for the first time in between microfabricated silicon probe tips driven by integrated electrostatic microactuators; the I-V characteristics of silicon nanowire was correlated with TEM in-situ observation of the wire upon its formation (by tip contact), extension, and extinction.