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3D microstructures fabrication of paraffin or plastics with laser heating

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3 Author(s)
Tsukada, N. ; Tokyo Univ., Japan ; Nakao, T. ; Higuchi, T.

This paper reports a novel fabrication technology for three dimensional (3D) microstructures of thermoplastic materials with laser heating. This technology employs the phenomenon that a thermoplastic material melted by laser heating grows into a convex shape with a high aspect ratio in a liquid. It does not require a mask or mold, therefore, the microstructure can be manufactured in a short time with a low cost. The size of the microstructures can be controlled by parameters of laser irradiation, including power and time. With this technique, we have fabricated various microstructures such as pillars, oblique pillars, and lines from paraffin. Also, a microstructure of polyethylene, one of general-purpose plastic materials, has been fabricated.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005