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Development of adhesive contact of MEMS-switches upon actuation cycling

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4 Author(s)
Gregori, G. ; Dept. of Mater., California Univ., Santa Barbara, CA, USA ; Mihailovich, R.E. ; DeNatale, J.F. ; Clarke, D.R.

MEMS switches are prone to adhesive failure upon actuation cycling. In this contribution, we present direct measurements of the adhesive contact forces and how they increase with cycling. These are correlated with microstructural changes in the contacts themselves and complementary changes in the electrical characteristics are reported.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005