By Topic

Micromachined capacitive transducer arrays for intravascular ultrasound imaging

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Guldiken, R.O. ; G.W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA ; Degertekin, F.L.

We designed, fabricated, and tested ring annular capacitive micromachined ultrasonic transducer (CMUT) arrays for forward looking intravascular ultrasound (IVUS) imaging in the 10-20MHz range. Our fabrication process uses low stress plasma enhanced chemical vapor deposition (PECVD) to form the silicon nitride membrane and provides localized vacuum sealing. The CMUT fabrication requires a maximum process temperature of 250°C enabling post-CMOS CMUT fabrication for electronics integration. Electrical and acoustic characterization results show that the process is repeatable and the response of 40 × 120μm CMUT elements of a lmm diameter array are suitable for IVUS imaging around 16MHz. We also present initial volumetric imaging experiments on different targets using a 32 element CMUT-based forward looking IVUS array and synthetic aperture image reconstruction techniques.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005